Flat panel x-ray imager sensors

Robert Street
Xerox PARC
August 20, 2002

Abstract:
Flat panel x-ray imagers using amorphous silicon active matrix addressing are being made for digital medical imaging, at sizes up to 40x40 cm, and with up to 10 million pixels. The talk will discuss the technology and performance of these devices, and will describe new approaches to further improve performance. For example, we show that polycrystalline HgI2 and PbI2 x-ray photoconductors can greatly improve sensitivity, and that laser recrystallized polysilicon enables amplifiers at the pixel level and also integrated drive electronics.